Two-dimensional structures of ferroelectric domain inversion in LiNbO3 by direct electron beam lithography

Two-dimensional Bragg grating lasers defined by electron-beam lithography

Two-dimensional Bragg grating 2DBG lasers with two quarter-wave slip line defects have been designed and fabricated by electron-beam lithography and reactive ion etching. Unlike conventional two-dimensional photonic crystal defect lasers, which use a large refractive index perturbation to confine light in a plane, the 2DBG structures described here selectively control the longitudinal and trans...

Electron-beam-induced domain poling in LiNbO3 for two-dimensional nonlinear frequency conversion

A bulk of LiNbO3 was periodically poled in two dimensions to achieve noncollinear second-harmonic generation. The sample was fabricated using an electron-beam indirect exposure. This method used a dielectric buffer layer deposited on LiNbO3 Z −-polar face to trap the incident electrons. These localized electrons formed a charge droplet which generated a strong electric field and triggered the d...

The Ferroelectric Domain Structures Induced by Electron Beam Scanning in Lithium Niobate

Ferroelectric domain structure has been formed under the action of electron beam scanning in congruent lithium niobate single crystal covered by surface dielectric layer. The obtained types of the domain patterns have been considered as subsequent stages of domain structure evolution. The dependence on irradiated charge density of domain density, length, and period of domain rays and stripe dom...

Dopant Driven Electron Beam Lithography

Introduction to Electron Beam Lithography

Electron Beam Lithography is a specialized technique for creating extremely fine patterns (~ 50 nm). Derived from the early scanning electron microscopes, the technique in brief consists of scanning a beam of electrons across a surface covered with a resist film sensitive to those electrons, thus depositing energy in the desired pattern in the resist film. The main attributes of the technology ...